The down-scaling of nanoelectronic devices to ever smaller dimensions and greater performance has pushed silicon-based devices to their physical limits. Much effort is currently being invested in research to examine the feasibility of replacing Si by a higher mobility semiconductor, such as germanium, in niche high-performance metal oxide semiconductor (MOS) devices. Before Ge can be adopted in industry, a suitable contact material for the active areas of a transistor must be identified. It is proposed that platinum group metal (pgm) germanides be used for this purpose, in a similar manner as metal silicides are used in Si technology. Implementation of Ge-based technology requires a thorough understanding of the solid-state interactions in metal/Ge systems in order to foresee and avoid problems that may be encountered during integration. We present a systematic study of the solid-state interactions in germanide systems of four of the pgms: iridium, platinum, palladium and rhodium. Our approach was essentially twofold. Firstly, conventional thin film couples were used to study the sequence of phase formation in the germanide systems. Conventional thin film couples were also used to identify and monitor the dominant diffusing species during the formation of some of the germanides as these can influence the thermal stability of a device. Secondly, we observed and analysed several aspects of the lateral diffusion reactions in these four systems, including activation energies and diffusion mechanisms. Lateral diffusion couples were prepared by the deposition of thick rectangular islands of one material on to thin films of another material. Rutherford backscattering spectrometry (RBS) and microprobe-Rutherford backscattering spectrometry (μRBS) were used to analyse several aspects of the thin film and lateral diffusion interactions respectively. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were also employed.
The thermodynamic properties were reviewed by the author in 1995. A new assessment of the enthalpy of fusion has led to a revision of the thermodynamic properties of the liquid phase and although the enthalpy of sublimation at 298.15 K is retained as 377 ± 4 kJ mol–1 the normal boiling point is revised to 3272 K at one atmosphere pressure.
In the century since the first platinum gauze for nitric acid production was made by Johnson Matthey, the demand for nitric acid has increased considerably with its vast number of applications: from fertiliser production to mining explosives and gold extraction. Throughout the significant changes in the industry over the past 100 years, there has been continual development in Johnson Matthey’s gauze technology to meet the changing needs of customers: improving efficiency, increasing campaign length, reducing metal losses and reducing harmful nitrous oxide emissions. This article reviews the progress in gauze development over the past century and looks at recent developments.
Definitive equations are suggested to represent the variation with temperature of the densities and molar volumes of the liquid platinum group metals whilst the previously unknown initial slopes of the melting curves for iridium, rhodium and ruthenium are estimated. 1. Introduction Paradis et al. (1) summarised determinations of the densities of the liquid platinum group metals but a...