High-Rate Sputtering of the Platinum Metals | Johnson Matthey Technology Review

1887

Volume 20, Issue 3

ISSN: 0032-1400

oa High-Rate Sputtering of the Platinum Metals

Economies in Processing Time
Source: Platinum Metals Review, Volume 20, Issue 3, Jul 1976, p. 94 - 95
DOI: https://doi.org/10.1595/003214076X2039495
- Published online: 01 Jan 1976

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1976-01-01

2024-11-24

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High-Rate Sputtering of the Platinum Metals

Platinum Metals Review 20, 94 (1976); https://doi.org/10.1595/003214076X2039495

/content/journals/10.1595/003214076X2039495

/content/journals/10.1595/003214076X2039495

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Article Type: Research Article

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