Journal Archive

Platinum Metals Rev., 1966, 10, (2), 53

Platinum-Wound Furnaces in the Manufacture of Semiconductors



For the diffusion heat treatment of semiconductor materials the advantages of rhodium-platinum wound tubular furnaces include long life at the high temperatures involved, compactness, and high rates of heating and cooling. Each of the units in this battery of Johnson Matthey furnaces in the Lincoln factory of Associated Electrical Industries Limited is maintained at a closely controlled temperature to carry out one of the many diffusion processes required by the wide range of devices produced by AEI.

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