Deposition of Platinum Films by Radio-Frequency Sputtering | Johnson Matthey Technology Review

1887

Volume 19, Issue 2

ISSN: 0032-1400

oa Deposition of Platinum Films by Radio-Frequency Sputtering
By J. C. C.
Source: Platinum Metals Review, Volume 19, Issue 2, Apr 1975, p. 59 - 59
DOI: https://doi.org/10.1595/003214075X1925959
- Published online: 01 Jan 1975

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1975-01-01

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Article Type: Research Article

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