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1887
Volume 29, Issue 1
  • ISSN: 0032-1400

Abstract

The sophistication possible with modern electronic and microelectronic devices depends ultimately on the materials from which they are made. The platinum metals have assumed a vital role in electronics at every stage in its evolution. They are found in both thin and thick film devices which together constitute the backbone of electronic manufacturing technology and overall this area represents one of their main applications in terms of metal consumption.

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1985-01-01
2024-10-14
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References

  1. M. Antler, Platinum Metals Rev., 1982, 26, (3), 106 [Google Scholar]
  2. “Kirk-Othmer Encyclopedia of Chemical Technology”, John Wiley, a Wiley-Interscience Publ., New York, Third Edn., Vol. 13, 1981, in section Integrated Circuits, pp. 62148 [Google Scholar]
  3. K. Y. Ahn, T. H. Di Stefano, N. J. Mazzeo, S. R. Herd, K. N. Tu, J. Appl. Phys., 1982, 53, (5), 3777; 1982, 53, (6), 4372 [Google Scholar]
  4. International Business Machines Corporation, U.S. Patent 4,399,605; 1983 [Google Scholar]
  5. International Business Machines Corporation, U.S. Patents 4,423,087; 1983 and 4,471,405; 1984 [Google Scholar]
  6. I. Lundström, Sens. Actuators, 1981, 1, (4), 403; 1981, 2, (2), 105 [Google Scholar]
  7. J. L. Shay, L. M. Schiavone, R. W, D. W. Taylor, J. Appl. Phys., 1982, 53, (9), 6004 [Google Scholar]
  8. B. E. Taylor, J. J. Felton, J. R. Larry, 1980, 149
  9. M. V. Coleman, G. E. Gurnett, 1977, XVIII, 18
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