Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films: Ruthenium target with uniform and fine grain can obtain better electrical properties

Yue Shen; Yanting Xu; Jun Gan; Renyao Zhang; Ming Wen

doi:10.1595/205651323X16859589078188

ISSN: 2056-5135

oa Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films

Ruthenium target with uniform and fine grain can obtain better electrical properties
Authors: Yue Shen¹, Yanting Xu¹, Jun Gan¹, Renyao Zhang¹ and Ming Wen¹
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Affiliations: ¹ Kunming Institute of Precious Metals, Yunnan Precious Metals Laboratory Co Ltd650106 KunmingChina
Source: Johnson Matthey Technology Review, Volume 68, Issue 1, Jan 2024, p. 4 - 13
DOI: https://doi.org/10.1595/205651323X16859589078188
- Received: 15 Feb 2023
- Accepted: 02 Jun 2023
- Published online: 05 Jun 2023

Abstract

Ruthenium targets were prepared by vacuum hot pressing of ruthenium powder with different morphologies. Ruthenium films were then deposited on a SiO2/Si(100) substrate for different times by radio frequency (RF) magnetron sputtering. The relationship in terms of the microstructure and electrical properties between the ruthenium targets and resultant films at different conditions were studied by means of field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), atomic force microscopy (AFM) and four-point probe. The results showed that parameters such as the average deposition rate, surface roughness, crystallisation properties and growth rate were directly related to the homogeneity of the microstructure of the ruthenium targets, but there was no correlation between the crystal orientations of the films and the targets. Moreover, the resistivity of ruthenium films was positively correlated with that of the ruthenium targets.

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2023-06-05

2024-12-21

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Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films

Johnson Matthey Technology Review 68, 4 (2024); https://doi.org/10.1595/205651323X16859589078188

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oa Effect of Ruthenium Targets on the Growth and Electrical Properties of Sputtering Ruthenium Films

Ruthenium target with uniform and fine grain can obtain better electrical properties

Abstract

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